Yoshifumi KATAYAMA

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and semiconductor-liquid crystal manufacturing...
- Patent number 9,887,117
- Issue date Feb 6, 2018
- Shinko Electric Industries Co., Ltd.
- Yoshifumi Katayama
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR-LIQUID CRYSTAL MANUFACTURING...
- Publication number 20150340261
- Publication date Nov 26, 2015
- Shinko Electric Industries Co., Ltd.
- Yoshifumi KATAYAMA
- G02 - OPTICS