Yoshifumi Katsumata

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,398,811
- Issue date Mar 19, 2013
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 8,388,409
- Issue date Mar 5, 2013
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,025,759
- Issue date Sep 27, 2011
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110306274
- Publication date Dec 15, 2011
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20100151770
- Publication date Jun 17, 2010
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20060166503
- Publication date Jul 27, 2006
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20050142991
- Publication date Jun 30, 2005
- Hidetaka Nakao
- B24 - GRINDING POLISHING