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Yoshifumi Kobayashi
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Omiya, JP
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last 30 patents
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Patent Grant
Method of exhausting silicon oxide
Patent number
5,573,591
Issue date
Nov 12, 1996
Mitsubishi Materials Silicon Corporation
Kazuhiro Ikezawa
C30 - CRYSTAL GROWTH
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Patent Grant
System for pulling-up monocrystal and method of exhausting silicon...
Patent number
5,476,065
Issue date
Dec 19, 1995
Mitsubishi Materials Silicon Corp.
Kazuhiro Ikezawa
C30 - CRYSTAL GROWTH