Yoshifumi Nakakoji

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Kumagaya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mark detection apparatus, mark detection method, measurement appara...
- Patent number 10,845,720
- Issue date Nov 24, 2020
- Nikon Corporation
- Shigeki Egami
- G01 - MEASURING TESTING
Information Patent Grant
Lithography apparatus and method utilizing pendulum interferometer...
- Patent number 7,466,396
- Issue date Dec 16, 2008
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MARK DETECTION APPARATUS, MARK DETECTION METHOD, MEASUREMENT APPARA...
- Publication number 20190171121
- Publication date Jun 6, 2019
- Nikon Corporation
- Shigeki EGAMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography apparatus and method utilizing pendulum interferometer...
- Publication number 20070139635
- Publication date Jun 21, 2007
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY