Yoshifumi Oda

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
- Patent number 8,663,432
- Issue date Mar 4, 2014
- Shibaura Mechatronics Corporation
- Masaaki Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum apparatus and driving mechanism therefor
- Patent number 6,337,003
- Issue date Jan 8, 2002
- Shibaura Mechatronics Corporation
- Kyoji Kinokiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
- Publication number 20110114473
- Publication date May 19, 2011
- SHIBAURA MECHATRONICS CORPORATION
- Masaaki Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...