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Yoshifumi UENO
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Oyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
Patent number
11,940,736
Issue date
Mar 26, 2024
Gigaphoton Inc.
Gota Niimi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser system and extreme ultraviolet light generation system
Patent number
11,228,156
Issue date
Jan 18, 2022
Gigaphoton Inc.
Yoshifumi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,219,116
Issue date
Jan 4, 2022
Gigaphoton Inc.
Yuta Takashima
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and EUV light generation system
Patent number
11,043,784
Issue date
Jun 22, 2021
Gigaphoton Inc.
Tsukasa Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
10,955,751
Issue date
Mar 23, 2021
Gigaphoton Inc.
Yuta Takashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target supply device, extreme ultraviolet light generation device,...
Patent number
10,667,376
Issue date
May 26, 2020
Gigaphoton Inc.
Yuta Takashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet (EUV) light generating apparatus and control me...
Patent number
10,609,803
Issue date
Mar 31, 2020
Gigaphoton Inc.
Yuichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,455,679
Issue date
Oct 22, 2019
Gigaphoton Inc.
Takashi Saito
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Illumination apparatus
Patent number
10,415,793
Issue date
Sep 17, 2019
Dexerials Corporation
Yasushi Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation device and method for controll...
Patent number
10,375,809
Issue date
Aug 6, 2019
Gigaphoton Inc.
Yuta Takashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,303,061
Issue date
May 28, 2019
Gigaphoton Inc.
Yuichi Nishimura
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating apparatus
Patent number
10,268,118
Issue date
Apr 23, 2019
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet detector and extreme ultraviolet light generating apparatus
Patent number
10,271,414
Issue date
Apr 23, 2019
Gigaphoton Inc.
Kouichi Satou
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Beam delivery system and control method therefor
Patent number
10,194,515
Issue date
Jan 29, 2019
Gigaphoton Inc.
Yoshifumi Ueno
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,111,312
Issue date
Oct 23, 2018
Gigaphoton Inc.
Toru Suzuki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system and method of generatin...
Patent number
10,057,972
Issue date
Aug 21, 2018
Gigaphoton Inc.
Yoshifumi Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sealing tape, phosphor sheet, lighting device, liquid-crystal displ...
Patent number
9,957,421
Issue date
May 1, 2018
Dexerials Corporation
Yasushi Ito
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
9,942,973
Issue date
Apr 10, 2018
Gigaphoton Inc.
Tamotsu Abe
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Transmission system for transmitting pulse laser beam to extreme ul...
Patent number
9,888,555
Issue date
Feb 6, 2018
Gigaphoton Inc.
Masahiko Ando
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
9,872,372
Issue date
Jan 16, 2018
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Phosphor sheet-forming resin composition
Patent number
9,577,158
Issue date
Feb 21, 2017
Dexerials Corporation
Yasushi Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method for target supply device, and target supply device
Patent number
9,192,037
Issue date
Nov 17, 2015
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
Patent number
8,901,522
Issue date
Dec 2, 2014
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Control method for target supply device, and target supply device
Patent number
8,841,639
Issue date
Sep 23, 2014
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source device and method for generating e...
Patent number
8,710,475
Issue date
Apr 29, 2014
Gigaphoton Inc.
Hiroshi Komori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus and method of generating...
Patent number
8,604,453
Issue date
Dec 10, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultra violet light source device
Patent number
8,586,953
Issue date
Nov 19, 2013
Gigaphoton Inc.
Hiroshi Komori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,513,630
Issue date
Aug 20, 2013
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
Patent number
8,492,738
Issue date
Jul 23, 2013
Gigaphoton, Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20240126185
Publication date
Apr 18, 2024
Gigaphoton Inc.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240023223
Publication date
Jan 18, 2024
Gigaphoton Inc.
Yuichi NISHIMURA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...
Publication number
20230101779
Publication date
Mar 30, 2023
Gigaphoton Inc.
Yuichi NISHIMURA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220110205
Publication date
Apr 7, 2022
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20210410262
Publication date
Dec 30, 2021
Gigaphoton Inc.
Yuta TAKASHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TIN TRAP DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AN...
Publication number
20210364928
Publication date
Nov 25, 2021
Gigaphoton Inc.
Gota NIIMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20200236769
Publication date
Jul 23, 2020
Gigaphoton Inc.
Yuta TAKASHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER APPARATUS AND EUV LIGHT GENERATION SYSTEM
Publication number
20200044407
Publication date
Feb 6, 2020
Gigaphoton Inc.
Tsukasa HORI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE,...
Publication number
20200033731
Publication date
Jan 30, 2020
Gigaphoton Inc.
Yuta TAKASHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190363508
Publication date
Nov 28, 2019
Gigaphoton Inc.
Yoshifumi UENO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET (EUV) LIGHT GENERATING APPARATUS AND CONTROL ME...
Publication number
20190361361
Publication date
Nov 28, 2019
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190289707
Publication date
Sep 19, 2019
Gigaphoton Inc.
Yuichi NISHIMURA
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND METHOD FOR CONTROLL...
Publication number
20190045616
Publication date
Feb 7, 2019
Gigaphoton Inc.
Yuta TAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20180284617
Publication date
Oct 4, 2018
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180224747
Publication date
Aug 9, 2018
Gigaphoton Inc.
Yoshifumi UENO
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20180103534
Publication date
Apr 12, 2018
Gigaphoton Inc.
Takashi SAITO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20180077785
Publication date
Mar 15, 2018
Gigaphoton Inc.
Toru SUZUKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DROPLET DETECTOR AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180007771
Publication date
Jan 4, 2018
Gigaphoton Inc.
Kouichi SATOU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
BEAM DELIVERY SYSTEM AND CONTROL METHOD THEREFOR
Publication number
20170280544
Publication date
Sep 28, 2017
Gigaphoton Inc.
Yoshifumi UENO
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170215267
Publication date
Jul 27, 2017
Gigaphoton Inc.
Tamotsu ABE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND METHOD OF GENERATIN...
Publication number
20170171955
Publication date
Jun 15, 2017
Gigaphoton Inc.
Yoshifumi UENO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION SYSTEM FOR TRANSMITTING PULSE LASER BEAM TO EXTREME UL...
Publication number
20170150591
Publication date
May 25, 2017
Gigaphoton Inc.
Masahiko ANDO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
Publication number
20170127505
Publication date
May 4, 2017
Institute for Laser Technology
Atsushi SUNAHARA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20170094767
Publication date
Mar 30, 2017
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SEALING TAPE, PHOSPHOR SHEET, LIGHTING DEVICE, LIQUID-CRYSTAL DISPL...
Publication number
20170009109
Publication date
Jan 12, 2017
DEXERIALS CORPORATION
Yasushi ITO
B32 - LAYERED PRODUCTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET...
Publication number
20150083939
Publication date
Mar 26, 2015
Gigaphoton Inc.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PHOSPHOR SHEET-FORMING RESIN COMPOSITION
Publication number
20140124813
Publication date
May 8, 2014
DEXERIALS CORPORATION
Yasushi Ito
B32 - LAYERED PRODUCTS
Information
Patent Application
PHOSPHOR SHEET-FORMING RESIN COMPOSITION
Publication number
20140097461
Publication date
Apr 10, 2014
DEXERIALS CORPORATION
Yasushi Ito
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
CONTROL METHOD FOR TARGET SUPPLY DEVICE, AND TARGET SUPPLY DEVICE
Publication number
20140070021
Publication date
Mar 13, 2014
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONTROL METHOD FOR TARGET SUPPLY DEVICE, AND TARGET SUPPLY DEVICE
Publication number
20140042653
Publication date
Feb 13, 2014
GIGAPHOTON INC.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR