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Film forming apparatus
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Patent number 5,512,155
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Issue date Apr 30, 1996
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Kabushiki Kaisha Toshiba
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Yoshiharu Fukasawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering target
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Patent number 5,190,630
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Issue date Mar 2, 1993
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Kabushiki Kaisha Toshiba
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Makoto Kikuchi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering target
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Patent number 4,966,676
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Issue date Oct 30, 1990
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Kabushiki Kaisha Toshiba
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Yoshiharu Fukasawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering target
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Patent number 4,842,706
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Issue date Jun 27, 1989
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Kabushiki Kaisha Toshiba
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Yoshiharu Fukasawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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