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Yoshiharu HIDAKA
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Osaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor substrate, method for fabricating the same, and metho...
Patent number
7,393,759
Issue date
Jul 1, 2008
Matsushita Electric Industrial Co., Ltd.
Yoshiharu Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing method
Patent number
7,331,844
Issue date
Feb 19, 2008
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning composition for removing resists and method of manufacturi...
Patent number
7,250,391
Issue date
Jul 31, 2007
Renesas Technology Corp.
Itaru Kanno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
7,249,995
Issue date
Jul 31, 2007
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
7,166,018
Issue date
Jan 23, 2007
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor substrate, method for fabricating the same, and metho...
Patent number
7,102,206
Issue date
Sep 5, 2006
Matsushita Electric Industrial Co., Ltd.
Yoshiharu Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
7,052,377
Issue date
May 30, 2006
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
6,790,127
Issue date
Sep 14, 2004
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
6,585,560
Issue date
Jul 1, 2003
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Method for wafer polishing and method for polishing-pad dressing
Patent number
6,428,398
Issue date
Aug 6, 2002
Matsushita Electric Industrial Co., Ltd.
Shin Hashimoto
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for feeding slurry
Patent number
6,319,099
Issue date
Nov 20, 2001
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Grant
Method for wafer polishing and method for polishing pad dressing
Patent number
6,180,423
Issue date
Jan 30, 2001
Matsushita Electronics Corporation
Shin Hashimoto
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20100304554
Publication date
Dec 2, 2010
Yoshiharu Hidaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20100178763
Publication date
Jul 15, 2010
Kenji NARITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20100178764
Publication date
Jul 15, 2010
Kenji NARITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20100144146
Publication date
Jun 10, 2010
Koji UTAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor substrate, method for fabricating the same, and metho...
Publication number
20060270193
Publication date
Nov 30, 2006
Matsushita Electric Industries Co., Ltd.
Yoshiharu Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20060199480
Publication date
Sep 7, 2006
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Application
Method of manufacturing semiconductor device
Publication number
20050191853
Publication date
Sep 1, 2005
Matsushita Electric Industrial Co., Ltd.
Yoshiharu Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20050003745
Publication date
Jan 6, 2005
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20040242127
Publication date
Dec 2, 2004
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor substrate, method for fabricating the same, and metho...
Publication number
20040140536
Publication date
Jul 22, 2004
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Yoshiharu Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20040132386
Publication date
Jul 8, 2004
Matsushita Electric Industrial Co., Ltd.
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Application
Cleaning composition for removing resists and method of manufacturi...
Publication number
20040106531
Publication date
Jun 3, 2004
Renesas Technology Corp.
Itaru Kanno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20020039878
Publication date
Apr 4, 2002
Akihiro Tanoue
B24 - GRINDING POLISHING
Information
Patent Application
Method for wafer polishing and method for polishing-pad dressing
Publication number
20010000490
Publication date
Apr 26, 2001
Matsushita Electronics Corporation
Shin Hashimoto
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and method for feeding slurry
Publication number
20010000166
Publication date
Apr 5, 2001
Akihiro Tanoue
B24 - GRINDING POLISHING