Yoshiharu Kataoka

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment method and exposure apparatus using the method
- Patent number 7,098,046
- Issue date Aug 29, 2006
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method, plane alignment method, exposure apparatus, and de...
- Patent number 6,876,435
- Issue date Apr 5, 2005
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and exposure apparatus using the method
- Patent number 6,838,686
- Issue date Jan 4, 2005
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 6,473,156
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring exposure condition and/or aberration of project...
- Patent number 5,814,425
- Issue date Sep 29, 1998
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus using the same
- Patent number 5,751,428
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Autofocusing device and projection exposure apparatus with the same
- Patent number 5,361,122
- Issue date Nov 1, 1994
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focusing method
- Patent number 5,323,016
- Issue date Jun 21, 1994
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for automatic focusing
- Patent number 4,714,331
- Issue date Dec 22, 1987
- Canon Kabushiki Kaisha
- Kazuyuki Oda
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Alignment method and exposure apparatus using the method
- Publication number 20040174510
- Publication date Sep 9, 2004
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, plane alignment method, exposure apparatus, and de...
- Publication number 20020166982
- Publication date Nov 14, 2002
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment method and exposure apparatus using the method
- Publication number 20020034831
- Publication date Mar 21, 2002
- Yoshiharu Kataoka
- H01 - BASIC ELECTRIC ELEMENTS

Yoshiharu Kataoka

Person

Patents Grantslast 30 patents

Alignment method and exposure apparatus using the method

Exposure method, plane alignment method, exposure apparatus, and de...

Alignment method and exposure apparatus using the method

Scanning exposure apparatus and device manufacturing method

Method of measuring exposure condition and/or aberration of project...

Exposure method and exposure apparatus using the same

Autofocusing device and projection exposure apparatus with the same

Focusing method

Method and apparatus for automatic focusing

Patents Applicationslast 30 patents

Alignment method and exposure apparatus using the method

Exposure method, plane alignment method, exposure apparatus, and de...

Alignment method and exposure apparatus using the method