Yoshiharu Kishida

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Amagasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply system, substrate processing system and gas supply method
- Patent number 10,665,430
- Issue date May 26, 2020
- Tokyo Electron Limited
- Atsushi Sawachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing structure of plasma processing apparatus, sealing method, a...
- Patent number 8,069,704
- Issue date Dec 6, 2011
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD
- Publication number 20180012735
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING STRUCTURE OF PLASMA PROCESSING APPARATUS, SEALING METHOD, A...
- Publication number 20090255324
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...