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Yoshiharu Ota
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Local exposure apparatus, local exposure method and storage medium
Patent number
9,146,481
Issue date
Sep 29, 2015
Tokyo Electron Limited
Yoshiharu Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interlock apparatus for a transfer machine
Patent number
6,336,054
Issue date
Jan 1, 2002
Tokyo Electron Limited
Yoshiharu Ota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating film forming method and coating apparatus
Patent number
6,183,810
Issue date
Feb 6, 2001
Tokyo Electron Limited
Yoshiharu Ota
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Scrubbing apparatus and scrubbing method
Patent number
6,058,544
Issue date
May 9, 2000
Tokyo Electron Limited
Kimio Motoda
B08 - CLEANING
Information
Patent Grant
Interlock apparatus for a transfer machine
Patent number
5,963,449
Issue date
Oct 5, 1999
Tokyo Electron Limited
Yoshiharu Ota
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LOCAL EXPOSURE APPARATUS, LOCAL EXPOSURE METHOD AND STORAGE MEDIUM
Publication number
20120002183
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Yoshiharu OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY