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Etching method
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Patent number 11,615,964
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Issue date Mar 28, 2023
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,551,937
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Issue date Jan 10, 2023
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,456,180
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Issue date Sep 27, 2022
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,417,530
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Issue date Aug 16, 2022
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing method
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Patent number 11,264,236
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Issue date Mar 1, 2022
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Tokyo Electron Limited
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Toru Hisamatsu
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H01 - BASIC ELECTRIC ELEMENTS
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Workpiece processing method
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Patent number 11,133,192
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Issue date Sep 28, 2021
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Tokyo Electron Limited
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Masahiro Tabata
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing method
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Patent number 11,114,304
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Issue date Sep 7, 2021
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Tokyo Electron Limited
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Takayuki Katsunuma
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,101,138
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Issue date Aug 24, 2021
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Tokyo Electron Limited
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Maju Tomura
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H01 - BASIC ELECTRIC ELEMENTS
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