Yoshihide Sakamoto

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT METHOD
- Publication number 20220013385
- Publication date Jan 13, 2022
- Tokyo Electron Limited
- Eiki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system
- Publication number 20060185793
- Publication date Aug 24, 2006
- TOKYO ELECTRON LIMITED
- Yoshihide Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS