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Yoshihide Tada
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of modifying insulating film
Patent number
8,021,987
Issue date
Sep 20, 2011
Tokyo Electron Limited
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming insulation film
Patent number
7,662,236
Issue date
Feb 16, 2010
Tokyo Electron Limited
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of modifying insulating film
Patent number
7,655,574
Issue date
Feb 2, 2010
Tokyo Electron Limited
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming underlying insulation film
Patent number
7,622,402
Issue date
Nov 24, 2009
Tokyo Electron Limited
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming insulation film
Patent number
7,446,052
Issue date
Nov 4, 2008
Tokyo Electron Limited
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing materials for electronic device
Patent number
7,217,659
Issue date
May 15, 2007
Tokyo Electron Limited
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating semiconductor device
Patent number
6,933,249
Issue date
Aug 23, 2005
Tokyo Electron Limited
Shin Yokoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing electronic device material
Patent number
6,897,149
Issue date
May 24, 2005
Tokyo Electron Limited
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming insulating film containing silicon...
Patent number
6,821,566
Issue date
Nov 23, 2004
Tokyo Electron Limited
Genji Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MODIFYING INSULATING FILM
Publication number
20100105215
Publication date
Apr 29, 2010
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Forming Insulation Film
Publication number
20100096707
Publication date
Apr 22, 2010
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Forming Insulation Film
Publication number
20080274370
Publication date
Nov 6, 2008
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing material of electronic device
Publication number
20070224837
Publication date
Sep 27, 2007
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for producing materials for electronic device
Publication number
20070218687
Publication date
Sep 20, 2007
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of modifying insulating film
Publication number
20060199398
Publication date
Sep 7, 2006
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming underlying insulation film
Publication number
20050255711
Publication date
Nov 17, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing material of electronic device
Publication number
20050233599
Publication date
Oct 20, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for producing material of electronic device
Publication number
20050227500
Publication date
Oct 13, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for producing materials for electronic device
Publication number
20050176263
Publication date
Aug 11, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for forming insulation film
Publication number
20050161434
Publication date
Jul 28, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor manufacturing apparatus and heat treatment method
Publication number
20040253839
Publication date
Dec 16, 2004
TOKYO ELECTRON LIMITED
Masahiro Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating semiconductor device
Publication number
20040152339
Publication date
Aug 5, 2004
Shin Yokoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for producing material of electronic device
Publication number
20040142577
Publication date
Jul 22, 2004
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of producing electronic device material
Publication number
20040048452
Publication date
Mar 11, 2004
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for forming insulating film containing silicon...
Publication number
20030068437
Publication date
Apr 10, 2003
Genji Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...