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Yoshihiko Aiba
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Kanagawa, JP
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last 30 patents
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Patent Grant
Projection type exposure method and apparatus
Patent number
5,247,329
Issue date
Sep 21, 1993
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and apparatus for detecting focal plane
Patent number
5,153,916
Issue date
Oct 6, 1992
Hitachi, Ltd.
Akira Inagaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY