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Yoshihiko FUJIMORI
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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for inspecting substrate, substrate inspection apparatus, ex...
Patent number
10,460,998
Issue date
Oct 29, 2019
Nikon Corporation
Yoshihiko Fujimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus, inspection method, exposure method, and metho...
Patent number
10,352,875
Issue date
Jul 16, 2019
Nikon Corporation
Kazuhiko Fukazawa
G01 - MEASURING TESTING
Information
Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
Patent number
9,322,788
Issue date
Apr 26, 2016
Nikon Corporation
Kazuhiko Fukazawa
G01 - MEASURING TESTING
Information
Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
Patent number
9,240,356
Issue date
Jan 19, 2016
Nikon Corporation
Kazuhiko Fukazawa
G01 - MEASURING TESTING
Information
Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
Patent number
9,196,550
Issue date
Nov 24, 2015
Nikon Corporation
Kazuhiko Fukazawa
G01 - MEASURING TESTING
Information
Patent Grant
Surface inspection method and surface inspection device
Patent number
7,907,268
Issue date
Mar 15, 2011
Nikon Corporation
Yoshihiko Fujimori
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection apparatus
Patent number
5,046,109
Issue date
Sep 3, 1991
Nikon Corporation
Yoshihiko Fujimori
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspecting apparatus
Patent number
4,942,619
Issue date
Jul 17, 1990
Nikon Corporation
Makoto Takagi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask inspecting apparatus
Patent number
4,870,693
Issue date
Sep 26, 1989
Nikon Corporation
Tetsuyuki Arai
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...
Publication number
20160041108
Publication date
Feb 11, 2016
Nikon Corporation
Kazuhiko FUKAZAWA
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT DEVICE, MEASUREMENT METHOD, AND METHOD FOR MANUFACTURIN...
Publication number
20140315330
Publication date
Oct 23, 2014
Yoshihiko FUJIMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE METHOD, AND METHO...
Publication number
20130217154
Publication date
Aug 22, 2013
Kazuhiko Fukazawa
G01 - MEASURING TESTING
Information
Patent Application
SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...
Publication number
20120164763
Publication date
Jun 28, 2012
Kazuhiko FUKAZAWA
G02 - OPTICS
Information
Patent Application
METHOD FOR INSPECTING SUBSTRATE, SUBSTRATE INSPECTION APPARATUS, EX...
Publication number
20120122252
Publication date
May 17, 2012
Yoshihiko FUJIMORI
G01 - MEASURING TESTING
Information
Patent Application
Surface Inspection Device
Publication number
20100182603
Publication date
Jul 22, 2010
Yoshihiko Fujimori
G01 - MEASURING TESTING
Information
Patent Application
SURFACE INSPECTION METHOD AND SURFACE INSPECTION DEVICE
Publication number
20100177312
Publication date
Jul 15, 2010
Yoshihiko Fujimori
G01 - MEASURING TESTING
Information
Patent Application
MANUFACTURING METHOD FOR INSPECTION DEVICE
Publication number
20090316978
Publication date
Dec 24, 2009
Yoshihiko Fujimori
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Surface inspection device
Publication number
20090079983
Publication date
Mar 26, 2009
NIKON CORPORATION
Yoshihiko Fujimori
G01 - MEASURING TESTING
Information
Patent Application
Surface inspection device
Publication number
20090074285
Publication date
Mar 19, 2009
NIKON CORPORATION
Yoshihiko Fujimori
G06 - COMPUTING CALCULATING COUNTING