Yoshihiko Nakagawa

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, gas-purging method, method for manu...
- Patent number 10,269,603
- Issue date Apr 23, 2019
- Kokusai Electric Corporation
- Yoshihiko Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 8,768,502
- Issue date Jul 1, 2014
- Hitachi Kokusai Electric Inc.
- Yoshihiko Nakagawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and display method of substrate proc...
- Patent number 8,712,568
- Issue date Apr 29, 2014
- Hitachi Kokusai Electric, Inc.
- Yoshihiko Nakagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, semiconductor device manufacturing...
- Patent number 8,417,394
- Issue date Apr 9, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 8,271,119
- Issue date Sep 18, 2012
- Hitachi Kokusai Electric Inc.
- Yoshihiko Nakagawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230106341
- Publication date Apr 6, 2023
- Kokusai Electric Corporation
- Aiko UMEDA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, GAS-PURGING METHOD, METHOD FOR MANU...
- Publication number 20160189993
- Publication date Jun 30, 2016
- Hitachi Kokusai Electric Inc.
- Yoshihiko NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND METHO...
- Publication number 20130102159
- Publication date Apr 25, 2013
- Hitachi Kokusai Electric Inc.
- Hiroshi KOTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing System
- Publication number 20130046403
- Publication date Feb 21, 2013
- Hitachi Kokusai Electric Inc.
- Yoshihiko Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD OF SUBSTRATE PROC...
- Publication number 20110055438
- Publication date Mar 3, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko Nakagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20100124726
- Publication date May 20, 2010
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing system
- Publication number 20090235865
- Publication date Sep 24, 2009
- Hitachi Kokusai Electric Inc.
- Yoshihiko Nakagawa
- G05 - CONTROLLING REGULATING

Yoshihiko Nakagawa

Person

Patents Grantslast 30 patents

Substrate processing apparatus, gas-purging method, method for manu...

Substrate processing apparatus and substrate processing system

Substrate processing apparatus and display method of substrate proc...

Substrate processing apparatus, semiconductor device manufacturing...

Substrate processing apparatus and substrate processing system

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, GAS-PURGING METHOD, METHOD FOR MANU...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND METHO...

Substrate Processing Apparatus and Substrate Processing System

SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD OF SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...

Substrate processing apparatus and substrate processing system