Yoshihiro Hirota

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,748,782
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase change memory and method for fabricating phase change memory
- Patent number 8,687,405
- Issue date Apr 1, 2014
- Tokyo Electron Limited
- Hajime Nakabayashi
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for forming silicon nitride film, method for manufacturing n...
- Patent number 8,318,614
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Masayuki Kohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MOS semiconductor memory device having charge storage region formed...
- Patent number 8,258,571
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Tetsuo Endoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitor and manufacturing method thereof
- Patent number 8,247,289
- Issue date Aug 21, 2012
- Ibiden Co., Ltd.
- Yoshiki Yamanishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 8,241,982
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Yoshihiro Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,897,498
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Glenn Gale
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Dielectric film capacitor and method of manufacturing the same
- Patent number 7,742,277
- Issue date Jun 22, 2010
- Ibiden Company Limited
- Tomotaka Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitance measurement method of micro structures of integrated ci...
- Patent number 7,176,706
- Issue date Feb 13, 2007
- Tokyo Electron Limited
- Matsumoto Toshiyuki
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic capacitance sensor, electrostatic capacitance sensor...
- Patent number 7,161,360
- Issue date Jan 9, 2007
- Tokyo Electron Ltd.
- Yoshihiro Hirota
- G01 - MEASURING TESTING
Information Patent Grant
Capacitance measurement method of micro structures of integrated ci...
- Patent number 6,906,548
- Issue date Jun 14, 2005
- Tokyo Electron Limited
- Matsumoto Toshiyuki
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic capacitance sensor, electrostatic capacitance sensor...
- Patent number 6,828,806
- Issue date Dec 7, 2004
- Sumitomo Metal Industries, Ltd.
- Yoshihiro Hirota
- G01 - MEASURING TESTING
Information Patent Grant
Impedance detection circuit, impedance detection device, and impeda...
- Patent number 6,756,790
- Issue date Jun 29, 2004
- Tokyo Electron Limited
- Masami Yakabe
- G01 - MEASURING TESTING
Information Patent Grant
Impedance detection apparatus and method of physical variable
- Patent number 6,373,264
- Issue date Apr 16, 2002
- Sumitomo Metal Industries, Ltd.
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Microscopic capacitance measurement system and probing system
- Patent number 6,348,809
- Issue date Feb 19, 2002
- Sumitomo Metal Industries Limited
- Yoshihiro Hirota
- G01 - MEASURING TESTING
Information Patent Grant
Impedance-to-voltage converter
- Patent number 6,335,642
- Issue date Jan 1, 2002
- Sumitomo Metal Industries Limited
- Tatsuo Hiroshima
- G01 - MEASURING TESTING
Information Patent Grant
Static capacitance-to-voltage converter and converting method
- Patent number 6,331,780
- Issue date Dec 18, 2001
- Sumitomo Metal Industries Ltd.
- Tatsuo Hiroshima
- G01 - MEASURING TESTING
Information Patent Grant
Capacitance detection system and method
- Patent number 6,326,795
- Issue date Dec 4, 2001
- Sumitomo Metal Industries, Ltd.
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Impedance-to-voltage converter and converting method
- Patent number 6,194,888
- Issue date Feb 27, 2001
- Sumitomo Metal Industries Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Level shift circuit
- Patent number 6,034,549
- Issue date Mar 7, 2000
- Sumitomo Metal Industries, Ltd.
- Toshiyuki Matsumoto
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Sensor circuit
- Patent number 5,973,538
- Issue date Oct 26, 1999
- Sumitomo Medal Industries, Ltd.
- Guoliang Shou
- G01 - MEASURING TESTING
Information Patent Grant
Layout structure of capacitive element(s) and interconnections in a...
- Patent number 5,892,266
- Issue date Apr 6, 1999
- Sumitomo Metal Industries, Ltd.
- Yoshihiro Hirota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STACKED SUBSTRATE FOR LASER LIFT-OFF, SUBSTRATE PROCESSING METHOD,...
- Publication number 20240387176
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Noboru OOIKE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190122894
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL HARD MASK AND METHOD OF MANUFACTURING SAME
- Publication number 20170287727
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yuuki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING PHASE CHANGE MEMORY
- Publication number 20140162428
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Hajime NAKABAYASHI
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD FOR PROCESSING OBJECT
- Publication number 20140038430
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Yoshiro Kabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCH DEVICE AND CROSSBAR MEMORY ARRAY USING SAME
- Publication number 20140034893
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Hajime NAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHASE CHANGE MEMORY AND METHOD FOR FABRICATING PHASE CHANGE MEMORY
- Publication number 20120314493
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Hajime NAKABAYASHI
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20120184107
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Yoshihiro Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20110073931
- Publication date Mar 31, 2011
- TOKYO ELECTRON LIMITED
- Yoshihiro HIROTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MODIFYING INSULATING FILM WITH PLASMA
- Publication number 20110053381
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Takashi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOS SEMICONDUCTOR MEMORY DEVICE
- Publication number 20100283097
- Publication date Nov 11, 2010
- TOKYO ELECTRON LIMITED
- Tetsuo Endoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR
- Publication number 20100176441
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Yoshihiro Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE FILM AND NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
- Publication number 20100140683
- Publication date Jun 10, 2010
- TOKYO ELECTRON LIMITED
- Seiichi Miyazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM, METHOD FOR MANUFACTURING N...
- Publication number 20100052040
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- Masayuki Kohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Manufacturing Semiconductor Device
- Publication number 20080268655
- Publication date Oct 30, 2008
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitor and manufacturing method thereof
- Publication number 20070181928
- Publication date Aug 9, 2007
- Yoshiki Yamanishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Peeling-off method and reworking method of resist film
- Publication number 20070184379
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shigeo Ashigaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Capacitor and manufacturing method thereof
- Publication number 20070181556
- Publication date Aug 9, 2007
- Yoshiki Yamanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric film capacitor and method of manufacturing the same
- Publication number 20070126041
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Tomotaka Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitance measurement method of micro structures of integrated ci...
- Publication number 20050225350
- Publication date Oct 13, 2005
- Matsumoto Toshiyuki
- G01 - MEASURING TESTING
Information Patent Application
Electrostatic capacitance sensor, electrostatic capacitance sensor...
- Publication number 20050140378
- Publication date Jun 30, 2005
- Yoshihiro Hirota
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Impedance detection circuit, impedance detector and method of imped...
- Publication number 20020171454
- Publication date Nov 21, 2002
- Masami Yakabe
- G01 - MEASURING TESTING

Yoshihiro Hirota

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Phase change memory and method for fabricating phase change memory

Method for forming silicon nitride film, method for manufacturing n...

MOS semiconductor memory device having charge storage region formed...

Capacitor and manufacturing method thereof

Semiconductor device manufacturing method

Method for manufacturing semiconductor device

Dielectric film capacitor and method of manufacturing the same

Capacitance measurement method of micro structures of integrated ci...

Electrostatic capacitance sensor, electrostatic capacitance sensor...

Capacitance measurement method of micro structures of integrated ci...

Electrostatic capacitance sensor, electrostatic capacitance sensor...

Impedance detection circuit, impedance detection device, and impeda...

Impedance detection apparatus and method of physical variable

Microscopic capacitance measurement system and probing system

Impedance-to-voltage converter

Static capacitance-to-voltage converter and converting method

Capacitance detection system and method

Impedance-to-voltage converter and converting method

Level shift circuit

Sensor circuit

Layout structure of capacitive element(s) and interconnections in a...

Patents Applicationslast 30 patents

STACKED SUBSTRATE FOR LASER LIFT-OFF, SUBSTRATE PROCESSING METHOD,...

Method of Manufacturing Semiconductor Device

METAL HARD MASK AND METHOD OF MANUFACTURING SAME

METHOD FOR FABRICATING PHASE CHANGE MEMORY

METHOD FOR PROCESSING OBJECT

SWITCH DEVICE AND CROSSBAR MEMORY ARRAY USING SAME

PHASE CHANGE MEMORY AND METHOD FOR FABRICATING PHASE CHANGE MEMORY

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

METHOD FOR MODIFYING INSULATING FILM WITH PLASMA

MOS SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR

SILICON NITRIDE FILM AND NONVOLATILE SEMICONDUCTOR MEMORY DEVICE

METHOD FOR FORMING SILICON NITRIDE FILM, METHOD FOR MANUFACTURING N...

Method for Manufacturing Semiconductor Device

Capacitor and manufacturing method thereof

Peeling-off method and reworking method of resist film

Capacitor and manufacturing method thereof

Dielectric film capacitor and method of manufacturing the same

Capacitance measurement method of micro structures of integrated ci...

Electrostatic capacitance sensor, electrostatic capacitance sensor...

Impedance detection circuit, impedance detector and method of imped...