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Yoshihiro Ii
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Phase shift mask blank, phase shift mask, and pattern transfer method
Patent number
7,351,505
Issue date
Apr 1, 2008
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Phase shift mask blank, phase shift mask, and pattern transfer method
Publication number
20050112477
Publication date
May 26, 2005
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY