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Yoshihiro Ishida
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and method for producing semiconductors using t...
Patent number
7,166,013
Issue date
Jan 23, 2007
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and method for producing semiconductors using t...
Patent number
7,137,866
Issue date
Nov 21, 2006
Hitachi Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and apparatus
Patent number
6,478,977
Issue date
Nov 12, 2002
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and apparatus
Patent number
6,180,020
Issue date
Jan 30, 2001
Hitachi, Ltd.
Shigeo Moriyama
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20060057940
Publication date
Mar 16, 2006
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20050095960
Publication date
May 5, 2005
Shigeo Moriyama
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method for producing semiconductors using t...
Publication number
20030199238
Publication date
Oct 23, 2003
Shigeo Moriyama
B24 - GRINDING POLISHING