Yoshihiro Ishida

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 8,336,487
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,168,270
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 7,968,472
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for forming silicon oxide film
- Patent number 7,906,168
- Issue date Mar 15, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20110197813
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORM...
- Publication number 20100186667
- Publication date Jul 29, 2010
- TOKYO ELECTRON LIMITED
- Katsutoshi ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD
- Publication number 20100167507
- Publication date Jul 1, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Horigome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20100035439
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080107824
- Publication date May 8, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for forming silicon oxide film
- Publication number 20080081104
- Publication date Apr 3, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yoshihiro Ishida

Person

Patents Grantslast 30 patents

Film forming apparatus

Film formation method and apparatus for semiconductor process

Film forming method and film forming apparatus

Film formation method and apparatus for forming silicon oxide film

Patents Applicationslast 30 patents

FILM FORMING APPARATUS

VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORM...

PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

Film formation method and apparatus for semiconductor process

Film formation method and apparatus for forming silicon oxide film