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Charged particle beam apparatus
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Patent number 10,665,420
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Issue date May 26, 2020
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Hitachi High-Technologies Corporation
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Yasunori Takasugi
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H01 - BASIC ELECTRIC ELEMENTS
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Micro actuator
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Patent number 8,097,986
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Issue date Jan 17, 2012
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THK Co., Ltd
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Yoshihiro Kimura
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Linear motor actuator
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Patent number 8,067,862
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Issue date Nov 29, 2011
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THK Co., Ltd
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Yoshihiro Kimura
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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XY table actuator
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Patent number 8,047,095
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Issue date Nov 1, 2011
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THK Co., Ltd
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Toshiyuki Aso
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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X-Y table actuator
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Patent number 7,880,344
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Issue date Feb 1, 2011
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THK Co., Ltd
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Yoshihiro Kimura
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Pattern measuring method
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Patent number 7,288,764
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Issue date Oct 30, 2007
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Hitachi High-Technologies Corporation
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Fumihiro Sasajima
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G01 - MEASURING TESTING
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Pattern measuring method
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Patent number 7,180,062
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Issue date Feb 20, 2007
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Hitachi High-Technologies Corporation
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Fumihiro Sasajima
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G01 - MEASURING TESTING
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