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Yoshihiro Komeyama
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Yokohama, JP
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last 30 patents
Information
Patent Grant
X-ray exposure apparatus
Patent number
4,825,453
Issue date
Apr 25, 1989
Hitachi, Ltd.
Yukio Kembo
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for alignment
Patent number
4,777,641
Issue date
Oct 11, 1988
Hitachi, Ltd.
Akira Inagaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection alignment method and apparatus
Patent number
4,708,484
Issue date
Nov 24, 1987
Hitachi, Ltd.
Yoshihiro Komeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment apparatus with optical length-varying optical system
Patent number
4,614,431
Issue date
Sep 30, 1986
Hitachi, Ltd.
Yoshihiro Komeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
X-Ray lithographic apparatus
Patent number
4,516,254
Issue date
May 7, 1985
Hitachi, Ltd.
Yoshihiro Komeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Precision parallel translation system
Patent number
4,492,356
Issue date
Jan 8, 1985
Hitachi, Ltd.
Motoya Taniguchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR