Yoshihiro Kondo

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing system and substr...
- Patent number 10,520,831
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Masashi Enomoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heating device, coating/developing system, heating method, coating/...
- Patent number 8,927,906
- Issue date Jan 6, 2015
- Tokyo Electron Limited
- Masahide Tadokoro
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist pattern slimming treatment method
- Patent number 8,455,183
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate measuring method, computer-readable recording medium reco...
- Patent number 8,041,525
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Yoshihiro Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate measuring method, computer-readable recording medium reco...
- Patent number 7,822,574
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20220113628
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND SUBSTR...
- Publication number 20180076066
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, COATING/DEVELOPING SYSTEM, HEATING METHOD, COATING/...
- Publication number 20110189602
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291490
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291491
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...
- Publication number 20080091381
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...
- Publication number 20080074657
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- Yoshihiro Kondo
- H01 - BASIC ELECTRIC ELEMENTS

Yoshihiro Kondo

Person

Patents Grantslast 30 patents

Substrate processing method, substrate processing apparatus, and st...

Substrate processing method, substrate processing system and substr...

Heating device, coating/developing system, heating method, coating/...

Resist pattern slimming treatment method

Substrate measuring method, computer-readable recording medium reco...

Substrate measuring method, computer-readable recording medium reco...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND SUBSTR...

HEATING DEVICE, COATING/DEVELOPING SYSTEM, HEATING METHOD, COATING/...

Resist pattern slimming treatment method

Resist pattern slimming treatment method

SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...

SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...