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Yoshihiro Koyama
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Kyoto, JP
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last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,396,199
Issue date
Jul 8, 2008
Dainippon Screen Mfg. Co., Ltd.
Yoshihiro Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating apparatus, cartridge and copper dissolution tank for use in...
Patent number
7,279,079
Issue date
Oct 9, 2007
Dainippon Screen Mfg. Co., Ltd.
Yasuhiro Mizohata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal processing apparatus
Patent number
6,868,302
Issue date
Mar 15, 2005
Dainippon Screen Mfg. Co., Ltd.
Toshiyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLATING APPARATUS, CARTRIDGE AND COPPER DISSOLUTION TANK FOR USE IN...
Publication number
20070235341
Publication date
Oct 11, 2007
Dainippon Screen Mfg. Co., Ltd.
Yasuhiro Mizohata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Thermal processing apparatus and thermal processing method
Publication number
20050149222
Publication date
Jul 7, 2005
Dainippon Screen Mfg. Co., Ltd.
Toshiyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plating apparatus, cartridge and copper dissolution tank for use in...
Publication number
20040069647
Publication date
Apr 15, 2004
Yasuhiro Mizohata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Thermal processing apparatus and thermal processing method
Publication number
20030186563
Publication date
Oct 2, 2003
Dainippon Screen Mfg. Co., Ltd.
Toshiyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20030123971
Publication date
Jul 3, 2003
Dainippon Screen Mfg. Co., Ltd.
Yoshihiro Koyama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS