Yoshihiro Morimoto

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vibration damping apparatus, lithography apparatus, and method of m...
- Patent number 10,481,509
- Issue date Nov 19, 2019
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,626,683
- Issue date Dec 1, 2009
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION DAMPING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20190278185
- Publication date Sep 12, 2019
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARTUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090015817
- Publication date Jan 15, 2009
- Canon Kabushiki Kaisha
- Yoshihiro Morimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY