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Yoshihiro Okamura
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Shizuoka, JP
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last 30 patents
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Patent Application
FILM-FORMING APPARATUS AND METHOD FOR CLEANING FILM-FORMING APPARATUS
Publication number
20130239993
Publication date
Sep 19, 2013
ULVAC, Inc.
Yohei Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20090120787
Publication date
May 14, 2009
ULVAC, Inc.
Yoshihiro OKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIAS SPUTTERING FILM FORMING PROCESS AND BIAS SPUTTERING FILM FORMI...
Publication number
20090095617
Publication date
Apr 16, 2009
Ulvac, Inc.
Myounggoo Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Bias sputtering film forming process and bias sputtering film formi...
Publication number
20040050687
Publication date
Mar 18, 2004
ULVAC, Inc.
Myounggoo Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...