Yoshihiro Shiode

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,759,994
- Issue date Sep 19, 2023
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, operation method of imprint apparatus, and artic...
- Patent number 11,413,651
- Issue date Aug 16, 2022
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method and article manufacturing method
- Patent number 11,400,619
- Issue date Aug 2, 2022
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 10,828,808
- Issue date Nov 10, 2020
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method
- Patent number 10,705,422
- Issue date Jul 7, 2020
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus
- Patent number 10,095,117
- Issue date Oct 9, 2018
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method for an imprint apparatus which transfers a pattern o...
- Patent number 9,921,470
- Issue date Mar 20, 2018
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 9,798,231
- Issue date Oct 24, 2017
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus
- Patent number 9,400,426
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus
- Patent number 9,285,675
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 9,283,720
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 8,842,294
- Issue date Sep 23, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,678,808
- Issue date Mar 25, 2014
- Canon Kabushiki Kaisha
- Setsuo Yoshida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measurement method and apparatus, and exposure apparatus
- Patent number 7,826,044
- Issue date Nov 2, 2010
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Grant
Measurement method and apparatus, exposure apparatus, exposure meth...
- Patent number 7,499,179
- Issue date Mar 3, 2009
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for polarization characteristic measurement of op...
- Patent number 7,468,798
- Issue date Dec 23, 2008
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Grant
Reticle and optical characteristic measuring method
- Patent number 7,423,740
- Issue date Sep 9, 2008
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Grant
Reticle and optical characteristic measuring method
- Patent number 7,375,805
- Issue date May 20, 2008
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Grant
Exposure method and apparatus
- Patent number 7,221,434
- Issue date May 22, 2007
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring optical characteristic, and proj...
- Patent number 7,193,713
- Issue date Mar 20, 2007
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle and optical characteristic measuring method
- Patent number 7,190,443
- Issue date Mar 13, 2007
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Grant
Reticle and optical characteristic measuring method
- Patent number 6,982,786
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aberration measuring method and projection exposure apparatus
- Patent number 6,960,415
- Issue date Nov 1, 2005
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus measurement in projection exposure apparatus
- Patent number 6,633,390
- Issue date Oct 14, 2003
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT METHOD, SHAPING DEVICE, SIMULATOR, MEASUREMENT DEVICE,...
- Publication number 20240262021
- Publication date Aug 8, 2024
- Canon Kabushiki Kaisha
- YOSHIHIRO SHIODE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ANALYSIS METHOD
- Publication number 20240219871
- Publication date Jul 4, 2024
- Canon Kabushiki Kaisha
- YOSHIHIRO SHIODE
- G05 - CONTROLLING REGULATING
Information Patent Application
MOLDING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20230173742
- Publication date Jun 8, 2023
- Canon Kabushiki Kaisha
- YOSHIHIRO SHIODE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20210023768
- Publication date Jan 28, 2021
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20200078989
- Publication date Mar 12, 2020
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190285982
- Publication date Sep 19, 2019
- Canon Kabushiki Kaisha
- Yoshihiro SHIODE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20180011400
- Publication date Jan 11, 2018
- Canon Kabushiki Kaisha
- Yoshihiro SHIODE
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170305043
- Publication date Oct 26, 2017
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, OPERATION METHOD OF IMPRINT APPARATUS, AND ARTIC...
- Publication number 20170274418
- Publication date Sep 28, 2017
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20160306281
- Publication date Oct 20, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, MOLD, IMPRINT METHOD, AND METHOD OF MANUFACTURIN...
- Publication number 20150021803
- Publication date Jan 22, 2015
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140367875
- Publication date Dec 18, 2014
- Yoshihiro Shiode
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20140346694
- Publication date Nov 27, 2014
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING...
- Publication number 20140118728
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Yoshihiro SHIODE
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20130056904
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20130056905
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20120328725
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20120086149
- Publication date Apr 12, 2012
- Canon Kabushiki Kaisha
- Setsuo YOSHIDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, TEMPLATE OF IMPRINT APPARATUS, AND ARTICLE MANUF...
- Publication number 20110206852
- Publication date Aug 25, 2011
- Canon Kabushiki Kaisha
- Yoshihiro SHIODE
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090086183
- Publication date Apr 2, 2009
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, EXPOSURE METH...
- Publication number 20070229803
- Publication date Oct 4, 2007
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT METHOD
- Publication number 20070171427
- Publication date Jul 26, 2007
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Application
RETICLE AND OPTICAL CHARACTERISTIC MEASURING METHOD
- Publication number 20070097355
- Publication date May 3, 2007
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, AND EXPOSURE APPARATUS
- Publication number 20070046929
- Publication date Mar 1, 2007
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Application
Exposure method and apparatus
- Publication number 20060268255
- Publication date Nov 30, 2006
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring apparatus, test reticle, exposure apparatus and device ma...
- Publication number 20060055915
- Publication date Mar 16, 2006
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle and optical characteristic measuring method
- Publication number 20050206881
- Publication date Sep 22, 2005
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring optical characteristic, and proj...
- Publication number 20040156041
- Publication date Aug 12, 2004
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle and optical characteristic measuring method
- Publication number 20030197865
- Publication date Oct 23, 2003
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle and optical characteristic measuring method
- Publication number 20030133099
- Publication date Jul 17, 2003
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G01 - MEASURING TESTING

Yoshihiro Shiode

Person

Patents Grantslast 30 patents

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, operation method of imprint apparatus, and artic...

Imprint method and article manufacturing method

Imprint apparatus, imprint method, and method of manufacturing article

Imprint method

Imprint apparatus

Imprint method for an imprint apparatus which transfers a pattern o...

Imprint apparatus and method of manufacturing article

Imprint apparatus

Imprint apparatus

Position detection apparatus, imprint apparatus, and position detec...

Position detection apparatus, imprint apparatus, and position detec...

Imprint apparatus and article manufacturing method

Measurement method and apparatus, and exposure apparatus

Measurement method and apparatus, exposure apparatus, exposure meth...

System and method for polarization characteristic measurement of op...

Reticle and optical characteristic measuring method

Reticle and optical characteristic measuring method

Exposure method and apparatus

Method and apparatus for measuring optical characteristic, and proj...

Reticle and optical characteristic measuring method

Reticle and optical characteristic measuring method

Aberration measuring method and projection exposure apparatus

Focus measurement in projection exposure apparatus

Patents Applicationslast 30 patents

MEASUREMENT METHOD, SHAPING DEVICE, SIMULATOR, MEASUREMENT DEVICE,...

ANALYSIS METHOD

MOLDING APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD

MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, OPERATION METHOD OF IMPRINT APPARATUS, AND ARTIC...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

IMPRINT APPARATUS, MOLD, IMPRINT METHOD, AND METHOD OF MANUFACTURIN...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, TEMPLATE OF IMPRINT APPARATUS, AND ARTICLE MANUF...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, EXPOSURE METH...

MEASUREMENT METHOD

RETICLE AND OPTICAL CHARACTERISTIC MEASURING METHOD

MEASUREMENT METHOD AND APPARATUS, AND EXPOSURE APPARATUS

Exposure method and apparatus

Measuring apparatus, test reticle, exposure apparatus and device ma...

Reticle and optical characteristic measuring method

Method and apparatus for measuring optical characteristic, and proj...

Reticle and optical characteristic measuring method

Reticle and optical characteristic measuring method