Yoshihiro Takenaga

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Yokkaichi-shi Mie, JP

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Patents Grantslast 30 patents

Information Patent Grant
Precise critical dimension control using bilayer ALD
- Patent number 9,443,716
- Issue date Sep 13, 2016
- Applied Materials, Inc.
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Precise Critical Dimension Control Using Bilayer ALD
- Publication number 20160104613
- Publication date Apr 14, 2016
- Applied Materials, Inc.
- Kenji Takeshita
- H01 - BASIC ELECTRIC ELEMENTS