Yoshihiro TAKEZAWA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing silicon film and film deposition apparatus
- Patent number 12,080,552
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and dummy substrate processing method
- Patent number 12,027,384
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing phosphorus-doped silicon film and system therefor
- Patent number 11,749,530
- Issue date Sep 5, 2023
- Tokyo Electron Limited
- Yoshihiro Takezawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,587,787
- Issue date Feb 21, 2023
- Tokyo Electron Limited
- Yoshihiro Takezawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal contamination prevention method and apparatus, and substrate...
- Patent number 11,486,043
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method of substrate processing apparatus and substrate pro...
- Patent number 11,260,433
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- B08 - CLEANING
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,047,044
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and method of forming...
- Patent number 10,734,221
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Taiki Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of forming metal compound film, and electronic...
- Patent number 9,234,275
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240328033
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra BASU
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240128081
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND METHOD FOR FORMING POLYCRYSTALLINE SILIC...
- Publication number 20230151480
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM
- Publication number 20230141501
- Publication date May 11, 2023
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220364228
- Publication date Nov 17, 2022
- Tokyo Electron Limited
- Yoshihiro TAKEZAWA
- B08 - CLEANING
Information Patent Application
METHOD OF DEPOSITING SILICON FILM AND FILM DEPOSITION APPARATUS
- Publication number 20220319845
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CRYSTALLIZING AMORPHOUS SILICON FILM AND DEPOSITION APPAR...
- Publication number 20220319846
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND DUMMY SUBSTRATE PROCESSING METHOD
- Publication number 20220148893
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220068642
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVING PHOSPHORUS-DOPED SILICON FILM AND SYSTEM THEREFOR
- Publication number 20210398817
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210202248
- Publication date Jul 1, 2021
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312677
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method and Film Forming Apparatus
- Publication number 20200308696
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Rui KANEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Method of Substrate Processing Apparatus and Substrate Pro...
- Publication number 20200230666
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- B08 - CLEANING
Information Patent Application
Metal Contamination Prevention Method and Apparatus, and Substrate...
- Publication number 20200040463
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...
- Publication number 20190013195
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Taiki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20180182652
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Yuji SESHIMO
- G05 - CONTROLLING REGULATING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180179630
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING METAL COMPOUND FILM, AND ELECTRONIC...
- Publication number 20140161706
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method of controlling substrate...
- Publication number 20090110824
- Publication date Apr 30, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yoshihiro TAKEZAWA

Person

Patents Grantslast 30 patents

Method of crystallizing amorphous silicon film and deposition appar...

Method of depositing silicon film and film deposition apparatus

Heat treatment apparatus and dummy substrate processing method

Method of removing phosphorus-doped silicon film and system therefor

Film forming method and film forming apparatus

Metal contamination prevention method and apparatus, and substrate...

Cleaning method of substrate processing apparatus and substrate pro...

Film forming apparatus and film forming method

Method of manufacturing semiconductor device and method of forming...

Method and apparatus of forming metal compound film, and electronic...

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM DEPOSITION METHOD AND METHOD FOR FORMING POLYCRYSTALLINE SILIC...

METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF DEPOSITING SILICON FILM AND FILM DEPOSITION APPARATUS

METHOD OF CRYSTALLIZING AMORPHOUS SILICON FILM AND DEPOSITION APPAR...

HEAT TREATMENT APPARATUS AND DUMMY SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

METHOD OF REMOVING PHOSPHORUS-DOPED SILICON FILM AND SYSTEM THEREFOR

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Film Forming Method and Film Forming Apparatus

Cleaning Method of Substrate Processing Apparatus and Substrate Pro...

Metal Contamination Prevention Method and Apparatus, and Substrate...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHOD AND APPARATUS OF FORMING METAL COMPOUND FILM, AND ELECTRONIC...

Substrate processing apparatus and method of controlling substrate...