Yoshihiro Tezuka

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Kamifukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,004,872
- Issue date Dec 21, 1999
- Tokyo Electron Limited
- Yoshihiro Tezuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a titanium film
- Patent number 5,942,282
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...