Yoshihiro Yamamoto

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, parameter management system for sub...
- Patent number 7,824,934
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Yoshihiro Yamamoto
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PARAMETER MANAGEMENT SYSTEM FOR SUB...
- Publication number 20070201156
- Publication date Aug 30, 2007
- TOKYO ELECTRON LIMITED
- Yoshihiro Yamamoto
- G05 - CONTROLLING REGULATING