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Yoshihiro YANAGI
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Transfer method and transfer system
Patent number
11,380,568
Issue date
Jul 5, 2022
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer method and transfer system
Patent number
10,861,729
Issue date
Dec 8, 2020
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240006165
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Yoshihiro YANAGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER METHOD AND TRANSFER SYSTEM
Publication number
20210057252
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER METHOD AND TRANSFER SYSTEM
Publication number
20200194295
Publication date
Jun 18, 2020
TOKYO ELECTRON LIMITED
Kippei SUGITA
H01 - BASIC ELECTRIC ELEMENTS