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Yoshihiro Yanagi
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Neyagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing method and apparatus
Patent number
7,205,250
Issue date
Apr 17, 2007
Matsushita Electric Industrial Co., Ltd.
Yoshihiro Yanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
6,875,698
Issue date
Apr 5, 2005
Matsushita Electric Industrial Co., Ltd.
Kiyohiko Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and apparatus
Patent number
5,922,223
Issue date
Jul 13, 1999
Matsushita Electric Industrial Co., Ltd.
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
5,888,413
Issue date
Mar 30, 1999
Matsushita Electric Industrial Co., Ltd.
Tomohiro Okumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
5,711,850
Issue date
Jan 27, 1998
Matsuhita Electric Industrial Co., Ltd.
Tomohiro Okumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
5,558,722
Issue date
Sep 24, 1996
Matsushita Electric Industrial Co., Ltd.
Tomohiro Okumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing method and apparatus
Publication number
20050037629
Publication date
Feb 17, 2005
Yoshihiro Yanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20040139917
Publication date
Jul 22, 2004
Naoshi Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dry etching method
Publication number
20010055886
Publication date
Dec 27, 2001
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Kiyohiko Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...