Yoshihisa Aoyama

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus having processing block including li...
- Patent number 11,139,181
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Hiroaki Inadomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190103291
- Publication date Apr 4, 2019
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS