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Turbo vacuum pump
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Patent number 5,020,969
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Issue date Jun 4, 1991
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Hitachi, Ltd.
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Masahiro Mase
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump
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Patent number 4,904,155
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Issue date Feb 27, 1990
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Hitachi, Ltd.
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Takashi Nagaoka
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Cryogenic liquefied pump system
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Patent number 4,593,835
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Issue date Jun 10, 1986
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Hitachi, Ltd.
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Seiichi Kikkawa
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...