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Yoshihisa Hirano
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of etching film formed on semiconductor wafer
Patent number
5,698,070
Issue date
Dec 16, 1997
Tokyo Electron Limited
Yoshihisa Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron plasma processing apparatus
Patent number
5,411,624
Issue date
May 2, 1995
Tokyo Electron Limited
Yoshihisa Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,356,515
Issue date
Oct 18, 1994
Tokyo Electron Limited
Yoshifumi Tahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching object to be processed including oxide or nitride...
Patent number
5,302,236
Issue date
Apr 12, 1994
Tokyo Electron Limited
Yoshifumi Tahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of adjusting the temperature of a semiconductor wafer
Patent number
5,270,266
Issue date
Dec 14, 1993
Tokyo Electron Limited
Yoshihisa Hirano
H01 - BASIC ELECTRIC ELEMENTS