Yoshihisa Kagawa

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 7,662,728
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulation film and apparatus for forming insula...
- Patent number 7,601,402
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20090011149
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method
- Publication number 20060205191
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming film
- Publication number 20040253777
- Publication date Dec 16, 2004
- Hidenori Miyoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming insulation film and apparatus for forming insula...
- Publication number 20040212114
- Publication date Oct 28, 2004
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...