Yoshihisa Kase

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,111,313
- Issue date Oct 23, 2018
- Shibaura Mechatronics Corporation
- Takeharu Motokawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing reflective mask and apparatus for manufact...
- Patent number 9,507,251
- Issue date Nov 29, 2016
- Shibaura Mechatronics Corporation
- Tomoaki Yoshimori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing reflective mask and apparatus for manufact...
- Patent number 8,702,901
- Issue date Apr 22, 2014
- Shibaura Mechatronics Corporation
- Tomoaki Yoshimori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING REFLECTIVE MASK AND APPARATUS FOR MANUFACT...
- Publication number 20140186754
- Publication date Jul 3, 2014
- Kabushiki Kaisha Toshiba
- Tomoaki Yoshimori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130256270
- Publication date Oct 3, 2013
- Kabushiki Kaisha Toshiba
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING REFLECTIVE MASK AND APPARATUS FOR MANUFACT...
- Publication number 20120129083
- Publication date May 24, 2012
- Kabushiki Kaisha Toshiba
- Tomoaki Yoshimori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD F...
- Publication number 20110092073
- Publication date Apr 21, 2011
- SHIBAURA MECHATRONICS CORPORATION
- Hideyuki Nitta
- H01 - BASIC ELECTRIC ELEMENTS