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Yoshihisa Ogawa
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Chiba, JP
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last 30 patents
Information
Patent Grant
Polishing compound and a method for polishing
Patent number
6,300,249
Issue date
Oct 9, 2001
SpeedFam Co Ltd
Akitoshi Yoshida
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing method for silicon wafers which uses a polishing compound...
Patent number
6,290,580
Issue date
Sep 18, 2001
Speedfam-pec Co Ltd
Hiroaki Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing compound and a polishing method for silicon wafer
Patent number
6,238,272
Issue date
May 29, 2001
SpeedFam-IPEC Co Ltd
Hiroaki Tanaka
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...