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Yoshihisa SUDOH
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Komaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Pulse shot type flow controller and pulse shot type flow controllin...
Patent number
6,913,031
Issue date
Jul 5, 2005
CKD Corporation
Tokuhide Nawata
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
TEMPERATURE CONTROL DEVICE
Publication number
20080314564
Publication date
Dec 25, 2008
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
G05 - CONTROLLING REGULATING
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Patent Application
Pulse shot flow regulator and pulse shot flow regulating method
Publication number
20040244837
Publication date
Dec 9, 2004
Tokuhide Nawata
G05 - CONTROLLING REGULATING