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Chuck cleaner and cleaning method
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Patent number 10,160,014
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Issue date Dec 25, 2018
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TOSHIBA MEMORY CORPORATION
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Yoshihito Kobayashi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Mask cleaner and cleaning method
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Patent number 9,348,218
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Issue date May 24, 2016
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Kabushiki Kaisha Toshiba
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Yoshihito Kobayashi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Device handler
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Patent number 6,406,246
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Issue date Jun 18, 2002
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Advantest Corporation
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Akihiko Itoh
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G01 - MEASURING TESTING
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IC tray holder
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Patent number D431580
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Issue date Oct 3, 2000
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Advantest Corporation
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Akihiko Ito
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D15 - Machines not elsewhere specified
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Method for forming resist patterns
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Patent number 5,580,702
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Issue date Dec 3, 1996
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Kabushiki Kaisha Toshiba
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Rumiko Hayase
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY