Yoshihito Tada

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
- Patent number 10,359,711
- Issue date Jul 23, 2019
- Canon Kabushiki Kaisha
- Yoshihito Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
- Publication number 20150268560
- Publication date Sep 24, 2015
- Canon Kabushiki Kaisha
- Yoshihito Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD, EXPOSURE APPARATUS, EXPOSURE SYSTEM, METHOD O...
- Publication number 20150248067
- Publication date Sep 3, 2015
- Canon Kabushiki Kaisha
- Yoshihito Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY