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Miyagi, JP
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last 30 patents
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Patent Application
Multilayer structural body and method for cleaning the same
Publication number
20090133713
Publication date
May 28, 2009
TOHOKU UNIVERSITY
Tadahiro Ohmi
B08 - CLEANING
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Patent Application
Member for a Plasma Processing Apparatus and Method of Manufacturin...
Publication number
20090101070
Publication date
Apr 23, 2009
TOHOKU UNIVERSITY
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...