Yoshiji Oka

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Kyoto, JP

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Patents Grantslast 30 patents

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Apparatus and method for detecting and conveying substrates in cass...
- Patent number 5,906,469
- Issue date May 25, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiji Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface apparatus for transporting substrates between substrate p...
- Patent number 5,308,210
- Issue date May 3, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS