Yoshikazu AZUMAYA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,056,318
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating unit and plasma processing apparatus
- Patent number 10,923,323
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,312,057
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Masayuki Kohno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190287768
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Takashi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190279845
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING UNIT AND PLASMA PROCESSING APPARATUS
- Publication number 20190006152
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160126114
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KOHNO
- H01 - BASIC ELECTRIC ELEMENTS