Yoshikazu ISHIKAWA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 9,824,861
- Issue date Nov 21, 2017
- Tokyo Electron Limited
- Masahiro Numakura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20160190024
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS