Yoshikazu Ito

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Anisotropic etching method and apparatus
- Patent number 5,766,498
- Issue date Jun 16, 1998
- Hitachi, Ltd.
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching system and plasma etching method
- Patent number 5,593,540
- Issue date Jan 14, 1997
- Hitachi, Ltd.
- Kazushi Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anisotropic etching method and apparatus
- Patent number 5,445,709
- Issue date Aug 29, 1995
- Hitachi, Ltd.
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching system
- Patent number 5,423,936
- Issue date Jun 13, 1995
- Hitachi, Ltd.
- Kazushi Tomita
- H01 - BASIC ELECTRIC ELEMENTS