Yoshikazu Kagata

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Nagoya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vapor-phase epitaxial growth process by a hydrogen pretreatment ste...
- Patent number 5,221,412
- Issue date Jun 22, 1993
- Toagosei Chemical Industry Co., Ltd.
- Yoshikazu Kagata
- C30 - CRYSTAL GROWTH