Yoshikazu Kago

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus
- Patent number 8,051,522
- Issue date Nov 8, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Akiyoshi Nakano
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR AND METHOD OF CLEANING SUBSTRATE
- Publication number 20090199869
- Publication date Aug 13, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Yoshikazu Kago
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20080263793
- Publication date Oct 30, 2008
- Akiyoshi Nakano
- B08 - CLEANING
Information Patent Application
Apparatus for and method of cleaning substrate
- Publication number 20050183754
- Publication date Aug 25, 2005
- Yoshikazu Kago
- B08 - CLEANING